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A high spatial resolution non-contact temperature measurement and mapping technique

Seeking commercialization partner forTemperature Mapping by Electron Probe in Scanning Electron MicroscopeRensselaer researchers have developed a scanning electron microscopy based temperature mapping technique which employs a temperature sensitive electron signal for nano-scale resolution, non-contact measurement. It provides enhanced capabilities...

Published: 6/4/2024 | Inventor(s): Xiaowei Wu, Robert Hull

Keywords(s): Environment

Category(s): Energy, Engineering & Physical Science, Environment, Biosensors